Optical and Electrophysical Properties of Thin Zinc Oxide Films Doped with Manganese Oxide and Obtained by Laser Deposition
نویسندگان
چکیده
Nanostructured thin films on a silicon substrate were obtained ceramic of zinc oxide doped with manganese by high-frequency periodic pulsed laser action f ~ 10–15 kHz, wavelength λ = 1.064 μm at power density q 150 MW/cm2 in vacuum chamber p 2.7 Pa. The surface morphology and the elemental composition studied using atomic force microscopy, scanning electron X-ray spectral microanalysis. Features transmission spectra visible, near, middle IR regions determined. electrophysical properties ZnO + 2% MnO2/Si heterostructure analyzed.
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ژورنال
عنوان ژورنال: Journal of Applied Spectroscopy
سال: 2021
ISSN: ['1573-8647', '0021-9037']
DOI: https://doi.org/10.1007/s10812-021-01170-y